Lab Assistant Probe Systems
$11,500.00 – $17,500.00
FEATURES AND BENEFITS:
- Small footprint – fits on a desk, small bench, in a glove box or dark box
- Sold as a completely configured system
- Interchangeable components – can be used as a single or multiple application system
- Modular – numerous accessories can be added for additional capability
- DC, HF/Microwave & Kelvin versions available
- Complete probe system – base. Stage, 50 mm, 100 mm, 150 mm, 200 mm chuck, platen with lift, microscope post, coaxial microscope movement of 100 mm x 100 mm, stereo zoom optics, and two (2) complete manipulators.
Description
The Lab Assistant Probe System for R & D centers and Universities with the stability and flexibility you need for your work. It is configured as a complete system and is installed by the customer and operational within an hour out of the crate.
The SemiProbe Lab Assistant family of probe systems is specifically designed to address the requirements of research personnel – simplicity and ease of operation, portability, affordability and modularity. The Lab Assistant provides features and options that are typically only available in much more expensive systems – multiple stages, chucks, optics and manipulators. Numerous accessories can be added at a later date to enhance the system functionality.
LAB ASSISTANT CONFIGURATION INCLUDES:
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SPECIFICATIONS:
| Dimensions | 420 mm X 540 mm X 535 mm (16.5” X 21.3” X 21.1”) (W,H,L) – with Optics |
| Weight | 32 kg (70 lbs.) |
| Base | Solid Aluminum rigid base on rubber vibration isolation feet |
| Chuck Stage X-Y Movement | Adjustable magnetic slide for coarse adjustment (> 200 mm) |
| Fine micrometer adjustment – 25 mm (X, Y) | |
| Entire stage easily removed via magnetic base | |
| Chuck stage Z movement | Z travel: 20 mm (0.78”) with micrometer driven contact/separation |
| Theta Movement | Travel: 360 degrees (coarse) and 10 degrees (fine) with theta locking knob |
| Chucks | Vacuum or mechanical clamping, round or square, HF, ambient, thermal and custom |
| Handle die, waffle packs, sawn wafers on frame, broken wafers and wafers up to 200 mm | |
| Nickel plated steel with concentric vacuum rings (standard), other materials available | |
| Platen | Aluminum with stainless steel top and removable front wedge for easy wafer handling |
| Manipulator fixation – magnetic (standard), vacuum (with optional vacuum manifolds) | |
| Platen Movement | Micrometer driven platen Z adjustment |
| Microscope Mounting | Rigid aluminum post (standard) or boom available |
| Microscope Movement | Manual coaxial and linear fine microscope movement -100 mm (X) and 100 mm (Y) (4”x 4”) |
| Optics | Trinocular stereo zoom microscope (standard), compound or zoom tube (optional) |
| Utilities | Power: AC 110/220V AC 50-60 Hz 20A |
| Vacuum: 23 Hg or -0.8 bar | |
| Options & Accessories | CCTV Systems (camera, monitor and adapter) and stand (shown in picture page 1) |
| Manipulators, Probe Arms, Probes, Cables – Coaxial, Triaxial, Kelvin, HF, Optical | |
| Probe Card and Package Part Holders | |
| Vibration Isolation Tables, Dark Box | |
| Stages – wafer, packaged part, thermal |
Note: Data and specifications vary depending on probe system configurations and accessories
PHYSICAL DIMENSIONS OF LAB ASSISTANT 200:
Copyright 2013 SemiProbe, Inc. All rights reserved. Probe System for Life and SemiProbe are registered trademarks. Lab Assistant, WIS Wafer Inspection and Pilot control software are trademarks of SemiProbe, Inc. All other trademarks are the property of their own respective owners.
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